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Resistivity Sensor

Product Detail Information

FEATURES

* Liquid supply system and tools used for semiconductor and all processing
(Chiller, D.I water line, etc.)

* Compact, easy to use.

* Extremely low internal volume

* 4 to 20mA output models available.

* Cleaning and package in CAS semiconductor's factory

 

 

SPECIFICATIONS

1. Model : CAS-RS series

2. Liquid : D.I water, FC-3283, Galden, other chemicals 

3. Range : 0~20 MΩ

4. Accuracy : ±1.5% of Full scale

5. Operating Temperature : -40~150oC

6. Operating Pressure : 10 kg/cm2 

7. Humidity : 0 to 95% RH

8. Power : 24 VDC with reserve polarity protection 

9. Output : 4~20 mA  

10. Electromagnetic compatibility (EMC & EMI)  

       "S" - according to EN55011:1998/A1:1999/A2:2002

                                  & EN61000-6-2:2001  

11. Material : 

      Body : SUS 316L

      Sensor : SUS 316L

Product Detail Image

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