Product Category menu

Category background

Flow Switch

Product Detail Information

FEATURES

* Liquid supply system and tools used for semiconductor and all processing.

* Protects pump and other equipment against low flow and no flow.

* Compact, easy to use.

* Extremely low internal volume.

* Cleaning and package in CAS Semiconductor's factory.

 

 

SPECIFICATIONS

1. Model : CAS - FS Series

2. Liquid : All Liquids (Chemicals)

3. Range : More then 3 LPM

                   Different Range Available

4. Accuracy : ±3% fo Full scale

5. Operating Temperature : -20 ~ 80oC

6. Operating Pressure : 10kg/cm2

7. Humidity : 0 to 95% RH

8. Power : 24 VDC with reserve polarity protection

9. Material

     Body : P.P

     Sensor : SUS 316L